| 1 | Define the operating frequency | Specify the nominal frequency, frequency range, and harmonic content. Common silicon RF applications operate from several hundred megahertz to several gigahertz. | Inductance, quality factor, substrate loss, and parasitic capacitance vary with frequency. A component that performs well at 1 GHz may not provide the same impedance or Q at 5 GHz. | Compare the inductance and Q curves at the actual operating frequency, not only the nominal inductance value. Include the expected frequency tolerance and tuning range. |
| 2 | Set the required inductance | Define the target value in nH or µH, together with tolerance. On-chip RF inductors are commonly specified in the low-nanohenry range, while power inductors generally require much higher values. | Inductance determines resonant frequency, impedance, matching behavior, filter response, and energy storage. Excessive inductance can increase area and parasitic capacitance. | State the required tolerance, such as ±5%, ±10%, or a design-specific value. Verify the value under the intended bias, frequency, temperature, and layout conditions. |
| 3 | Determine the required quality factor | Specify the minimum Q at the operating frequency. RF silicon inductors may have single-digit to several-tens Q values, depending on geometry, process, frequency, and substrate. | Higher Q generally means lower loss and better efficiency in resonators, voltage-controlled oscillators, matching networks, and filters. Q can decrease near self-resonance and under lossy substrate conditions. | Use the minimum guaranteed or modeled Q at the worst-case frequency and temperature. Do not compare Q values measured at different frequencies or with different de-embedding methods. |
| 4 | Check self-resonant frequency | Define a minimum self-resonant frequency, preferably above the highest signal or harmonic frequency. A practical design target is often to keep the operating frequency substantially below the SRF. | Parasitic capacitance between turns, to the substrate, and between metal layers causes the inductor to become capacitive above its self-resonant frequency. | Confirm that the required inductive behavior is maintained across process, voltage, temperature, and layout corners. Review both series and shunt resonance behavior in the complete circuit. |
| 5 | Define current and voltage stress | Specify RMS current, peak current, DC current, signal swing, and maximum terminal voltage. RF current ratings are often limited by metal current density and electromigration rather than magnetic-core saturation. | Excessive current increases metal loss, self-heating, distortion, and long-term reliability risk. Large voltage swings can stress thin dielectric layers and increase nonlinear parasitic effects. | Compare the expected current density and voltage stress with the process design rules. For switched-power use, also verify saturation behavior, ripple current, and transient conditions. |
| 6 | Evaluate DC resistance and loss | Record series resistance in Ω, metal width, metal thickness, and the expected AC resistance. AC resistance can exceed DC resistance because of skin and proximity effects. | Series resistance reduces Q and causes power loss. At higher frequencies, current crowding can make conductor geometry as important as nominal metal resistivity. | Calculate conduction loss using the actual waveform. Request or simulate frequency-dependent resistance, especially when the inductor is used in a high-Q RF or resonant circuit. |
| 7 | Account for substrate and shielding effects | Identify the substrate type, resistivity, available top-metal options, underpass structure, and any patterned ground shield. | Silicon substrates can introduce eddy-current and capacitive losses. A shield may reduce substrate coupling but can also increase parasitic capacitance and reduce SRF if improperly designed. | Compare insertion loss, Q, SRF, and substrate coupling with and without shielding. Use electromagnetic simulation with the actual process stack and neighboring structures. |
| 8 | Reserve layout area and obey design rules | Define maximum footprint, outer diameter, metal width, spacing, number of turns, and keep-out region. Silicon inductors may occupy a substantial fraction of an RF integrated-circuit layout. | Increasing diameter, metal width, or turn count can raise inductance, but may also increase parasitic capacitance, area, and coupling to nearby blocks. | Optimize inductance, Q, SRF, area, and routing simultaneously. Keep sensitive nodes away from the inductor and follow minimum spacing and density requirements. |
| 9 | Specify temperature and reliability limits | Define the operating temperature range, commonly including commercial or industrial limits such as 0 to 70 °C or -40 to 85 °C. Include lifetime, electromigration, and thermal-cycling requirements. | Metal resistance, substrate loss, dielectric properties, and mechanical stress change with temperature. These changes can shift inductance, Q, SRF, and matching accuracy. | Verify performance at temperature corners and after reliability stress. Use worst-case resistance and current density for electromigration assessment. |
| 10 | Validate tolerance, coupling, and modeling accuracy | Define process variation, mismatch, mutual coupling coefficient, model frequency range, and de-embedding requirements. For coupled inductors, specify polarity, coupling coefficient, and allowable leakage inductance. | Process variation and nearby metal can alter the effective inductance and Q. Mutual coupling can be useful in transformers but may create unwanted feedback, noise transfer, or detuning. | Use corner and Monte Carlo simulation where applicable. Validate the final layout with electromagnetic extraction and compare measured S-parameters with the model over the complete operating band. |